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  • Plasma Processing Laboratory
    • The Plasma Processing Laboratory consists of an array of state-of- the-art tools for processing of advanced materials and nanostructures in partially ionized gases, as well as gas phase/surface diagnostics.

    • University of Maryland is a center of scanned probe innovation. This tour will include laboratories in Physics and the Center for Superconductivity Research (CSR). Additional innovative scanned probe development and application work can be found on the LPS tour.
      Labs to be included in this tour:
      Scanning Microwave Microscopy (0310ACSR)
      Scanning SQUID Microscopy (0219 CSR)
      Scanning Single Electron Transistors (0219 CSR)
      Vacuum Atomic, Magnetic and Electrostatic Force Microscopy (1314 Physics)
      Variable Temperature STM (2317 Physics)

  • The Center For Microscopy and Microanalysis
    • The Microscopy and Microanalysis Center specializes in the structural and compositional characterization of materials. The MMC houses a JEOL 8900 superprobe microprobe equipped with an energy dispersive and four wavelength dispersive x-ray detectors. It also has a JEOL 4000FX TEM/STEM electron microscope and a Hitachi 600 AB TEM. The JEOL TEM has a point-point resolution of 0.19 nm and lattice resolution of 0.14 nm. The Hitachi TEM is equipped with an energy dispersive X-ray detector for composition analysis. In addition to the TEM equipment, the MMC has an environmental SEM ElectroScan E3, a Dimension 3000 scanning probe microscope, Nicolet 550 and Spectra-Tech FTIR microscope. The Center also has all the software (for image processing and image simulation) and hardware (for image digitization) necessary to analyze TEM images and all the necessary equipment for sample preparation for TEM observation.
    • The work of the laboratory is centered on the generation of
      ion beams and their application to microfabrication. The program of research includes new applications of high resolution focused ion beams (FIBs) for material science and electronic devices, high brightness ion sources for these systems, ion beam induced chemical reactions, and projects in support of ion projection lithography for full chip exposure.
  • CVD and Nanoparticle Processing
    • The Materials Surface Laboratory includes a hybrid nanoparticle nucleation/CVD reactor for forming nanoporous materials. It also houses CVD systems for atomic layer by layer growth of oxides including ultra-thin dielectrics, complex oxides, and nanolaminate films. This includes surface spectroscopy and optical characterization instruments to study film properties.

  • Laboratory for Advanced Materials Processing (LAMP)
    • The Laboratory for Advanced Materials Processing (LAMP) features nanoscale-controlled materials processing, including chemical vapor and atomic layer deposition of metals and ultra-thin metal nitrides, low-K dielectric materials processing, and real-time, in-situ chemical sensing for process understanding and control.

  • Nanoelectronics Laboratory
    • More information on the tour will be posted as the date of the Open House approaches

  • Smart Small Systems
    • More information on the tour will be posted as the date of the Open House approaches

  • LPS
    • Research investment in the future of nanoelectronics includes programs in quantum computing, quantum-MEMs, novel direct imaging techniques and novel scanned probe applications, supported by state-of-the-art fabrication facilities. Tours will require a short drive to the Lab, which is located just off campus, off of Metzerott Road.
      Laboratories to be toured are:
      Quantum Computing ( B. Kane)
      Nano-magnetics and Magnetic Force Microscopy (1218 LPS, M.Dreyer)
      Quantum MEMS ( K. Schwab)
      Near-Field Optical Microscopy ( LPS, D. Drew)
      Low-Energy Electron Microscopy and STM for nanostructures (1212 &1221 LPS, R.J. Phaneuf)
      Photo-Emission Microscopy for micro and nanostructures (1221 LPS, V. Ballarotto)
      Clean Room Facility - MBE and Microfabrication (Tobey Olver)_



Participating Units at The University of Maryland:
Center for Superconductivity Research
Department of Chemical Engineering
Department of Chemistry & Biochemistry
Department of Electrical & Computer Engineering
Department of Geology
Department of Materials & Nuclear Engineering
Department of Mechanical Engineering
Department of Physics
Institute for Physical Science & Technology (IPST)
Institute for Research in Electronics and Applied Physics (IREAP)
Institute for Systems Research (ISR)
Materials Research Science & Engineering Center (MRSEC)
And Neighboring Government Laboratories:
Laboratory for Physical Science
NASA-Goddard Space Flight Center