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Plasma
Processing Laboratory
- The Plasma
Processing Laboratory consists of an array of state-of-
the-art tools for processing of advanced materials and
nanostructures in partially ionized gases, as well as
gas phase/surface diagnostics.
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University
of Maryland is a center of scanned probe innovation. This
tour will include laboratories in Physics and the Center
for Superconductivity Research (CSR). Additional innovative
scanned probe development and application work can be
found on the LPS tour.
Labs to be included in this tour:
Scanning Microwave Microscopy (0310ACSR)
Scanning SQUID Microscopy (0219 CSR)
Scanning Single Electron Transistors (0219 CSR)
Vacuum Atomic, Magnetic and Electrostatic Force Microscopy
(1314 Physics)
Variable Temperature STM (2317 Physics)
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The
Center For Microscopy and Microanalysis
- The Microscopy
and Microanalysis Center specializes in the structural
and compositional characterization of materials. The MMC
houses a JEOL 8900 superprobe microprobe equipped with
an energy dispersive and four wavelength dispersive x-ray
detectors. It also has a JEOL 4000FX TEM/STEM electron
microscope and a Hitachi 600 AB TEM. The JEOL TEM has
a point-point resolution of 0.19 nm and lattice resolution
of 0.14 nm. The Hitachi TEM is equipped with an energy
dispersive X-ray detector for composition analysis. In
addition to the TEM equipment, the MMC has an environmental
SEM ElectroScan E3, a Dimension 3000 scanning probe microscope,
Nicolet 550 and Spectra-Tech FTIR microscope. The Center
also has all the software (for image processing and image
simulation) and hardware (for image digitization) necessary
to analyze TEM images and all the necessary equipment
for sample preparation for TEM observation.
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The
work of the laboratory is centered on the generation of
ion beams and their application to microfabrication. The
program of research includes new applications of high
resolution focused ion beams (FIBs) for material science
and electronic devices, high brightness ion sources for
these systems, ion beam induced chemical reactions, and
projects in support of ion projection lithography for
full chip exposure.
- CVD and Nanoparticle
Processing
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The
Materials Surface Laboratory includes a hybrid nanoparticle
nucleation/CVD reactor for forming nanoporous materials.
It also houses CVD systems for atomic layer by layer growth
of oxides including ultra-thin dielectrics, complex oxides,
and nanolaminate films. This includes surface spectroscopy
and optical characterization instruments to study film
properties.
- Laboratory
for Advanced Materials Processing (LAMP)
- The Laboratory
for Advanced Materials Processing (LAMP) features nanoscale-controlled
materials processing, including chemical vapor and atomic
layer deposition of metals and ultra-thin metal nitrides,
low-K dielectric materials processing, and real-time, in-situ
chemical sensing for process understanding and control.
- Nanoelectronics
Laboratory
- More
information on the tour will be posted as the date of the
Open House approaches
- Smart
Small Systems
- More
information on the tour will be posted as the date of the
Open House approaches
- LPS
- Research investment
in the future of nanoelectronics includes programs in quantum
computing, quantum-MEMs, novel direct imaging techniques
and novel scanned probe applications, supported by state-of-the-art
fabrication facilities. Tours will require a short drive
to the Lab, which is located just off campus, off of Metzerott
Road.
Laboratories to be toured are:
Quantum Computing ( B. Kane)
Nano-magnetics and Magnetic Force Microscopy (1218 LPS,
M.Dreyer)
Quantum MEMS ( K. Schwab)
Near-Field Optical Microscopy ( LPS, D. Drew)
Low-Energy Electron Microscopy and STM for nanostructures
(1212 &1221 LPS, R.J. Phaneuf)
Photo-Emission Microscopy for micro and nanostructures (1221
LPS, V. Ballarotto)
Clean Room Facility - MBE and Microfabrication (Tobey Olver)_
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