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Materials Research Science and Engineering Center (MRSEC)
The NSF-supported Materials Research Science and Engineering Center applies innovative scanned probe microscopies to the dynamics of materials at the nanoscale, including ferroelectric switching and electromigration.

Laboratory for Ion Beam Research and Applications (LIBRA)
This center is mainly devoted to focused ion beam nonofabrication and to the study and application of ion-surface interactions.

Center for Superconductivity Research (CSR)
The CSR conducts interdisciplinary research in superconductivity, magnetism, ferroelectricity, the synthesis and characterization of advanced electronic materials and devices, and the development of scanning probe microscopies.

Smart Small Systems/MEMS
Activities in these areas are spread over 5 departments and are aimed at micro/nano fabricated devices that have built in intelligence and that perform useful functions.

Laboratory for Advanced Materials Processing (LAMP)

These laboratories feature nanoscale-controlled materials processing. The Laboratory for Advanced Materials Processing supports chemical vapor and atomic layer deposition of metals and ultra-thin metal nitrides, low-K dielectric material processing, and real-time, in situ chemical sensing for process understanding and control. The Plasma Processing Laboratory also contains state-of-the-art tools for processing advanced materials and nanostructures in partially ionized gases, as well as gas phase/surface diagnostics.

Nanoparticle and Nanostructured Materials
The Nanoparticle Fabrication Laboratory includes a hybrid nanoparticle nucleation/CVD reactor for forming nanporous materials; CVD systems for atomic layer by layer growth of oxides including ultra-thin dielectrics, complex oxides, and nonlaminate films; and surface spectroscopy and optical characterization instruments to study film properties.

Molecular Electronics
Extensive in-house facilities and instrumentation are being used in the design, synthesis and evaluation of new molecular frameworks that can serve as analogs of diodes and transistors.

Nanoelectronics Research
Research in nanoscale electronics is supported by SEMs converted for electron beam lithography; cryogenic magnetotransport systems, cryogenic STMs and AFMs with magnetic field; FTIR spectrometry.

Gemstone Nanotechnology Team
The goal of the University of Maryland Gemstone Nanotechnology Team is to find practical applications of nanotechnology that will contribute toward the greater good of society.

Laboratory for Physical Sciences
Research investment in the future of nanoelectronics includes programs in quantum computing, quantum-MEMs, novel scanned probe applications, supported by state-of-the-art fabrication facilities.

Goddard Space Flight Center, Detector Development Branch
Innovative development of integrated sensor technologies in support of space missions, including single-electron transistors, MEMs, and novel materials applications.



Participating Units at The University of Maryland:
Center for Superconductivity Research
Department of Chemical Engineering
Department of Chemistry & Biochemistry
Department of Electrical & Computer Engineering
Department of Geology
Department of Materials & Nuclear Engineering
Department of Mechanical Engineering
Department of Physics
Institute for Physical Science & Technology (IPST)
Institute for Research in Electronics and Applied Physics (IREAP)
Institute for Systems Research (ISR)
Materials Research Science & Engineering Center (MRSEC)
And Neighboring Government Laboratories:
Laboratory for Physical Science
NASA-Goddard Space Flight Center